Elastic nano-structure of diamond-like carbon (DLC)

Autor:	Shizuka Nakano, Haruyuki Yasui, Kaoru Awazu, Mikiko Yoshida, Hisato Ogiso
Rok vydání:	2006
Předmět:	Nuclear and High Energy Physics Materials science Diamond-like carbon Diamond chemistry.chemical_element Nanotechnology engineering.material Scanning probe microscopy Ion implantation chemistry Phase (matter) Nano engineering Nanometre Composite material Instrumentation Carbon
Zdroj:	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 242:311-314
ISSN:	0168-583X
DOI:	10.1016/j.nimb.2005.08.054
Popis:	This research discusses the elastic nano-structure of diamond-like carbon (DLC) films. Two DLC film samples deposited by plasma based ion implantation (PBII) were prepared. The plasma generated by microwave (MW) was applied to one sample and the plasma by radio frequency (RF) to the other sample. The samples were evaluated for the elastic property image with nanometer resolution using scanning probe microscopy (SPM). The film surface deposited by RF-PBII was very flat and homogeneous in elastic property. In contrast, the film surface by MW-PBII was more uneven than that by RF-PBII and both the locally hard and the locally soft regions were found at the film surface. The size of the structure in elastic property is several tens nanometer. We conclude that the film probably contains nano-scale diamond phase.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::1058052b47ad249d6e344c496e2e3e8c https://doi.org/10.1016/j.nimb.2005.08.054 Zobrazit plný text záznamu Full Text from ScienceDirect