Low-temperature PECVD deposition of highly conductive n-type microcrystalline silicon thin films for optoelectronic applications
| Autor: | Brahim Aissa, Amir A. Abdallah, Juan Lopez Garcia |
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| Rok vydání: | 2022 |
| Zdroj: | 2022 IEEE 49th Photovoltaics Specialists Conference (PVSC). |
| Databáze: | OpenAIRE |
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