| Popis: |
In this paper, the multi-hydroxyl polyamines researched by ourselves are used in the slurry of the copper wiring CMP of GLSI, which makes the slurry alkalization. It also has the using as a pH adjusting agent, complexion agent of copper ion, multi- metal chelating agents, aminating agent of acidic oxides, pH buffer, stainless steel corrosion inhibitor, the active agent and pro-oxidant. It improves the property of slurry and solves many different of acidity slurry. The alkalinity slurry contained the multi-hydroxyl polyamines is environmental, inexpensive and composition- simplified. Without the toxic BTA which is must be used in the international and has side effect, the slurry can achieve the high speed and high flat. In the same time the low pressure and the little abrasive can be realized, which provide the new material for the removal of TSV copper film. |
