Dielectric properties of continuous composition spreaded MgO–Ta2O5 thin films
| Autor: | Kyung Bong Park, Jin Sang Kim, Ji-Won Choi, Seok-Jin Yoon, Yun Hoe Kim, Jonghan Song |
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| Rok vydání: | 2011 |
| Předmět: |
Materials science
Analytical chemistry General Physics and Astronomy Surfaces and Interfaces General Chemistry Substrate (electronics) Dielectric Sputter deposition Condensed Matter Physics Surfaces Coatings and Films Dielectric loss Composition (visual arts) Thin film Rapid thermal annealing High-κ dielectric |
| Zdroj: | Applied Surface Science. 258:843-847 |
| ISSN: | 0169-4332 |
| DOI: | 10.1016/j.apsusc.2011.09.004 |
| Popis: | The dielectric properties of MgO–Ta 2 O 5 continuous composition spread (CCS) thin films were investigated. The MgO–Ta 2 O 5 CCS thin films were deposited on Pt/Ti/SiO 2 /Si substrates by off-Axis RF magnetron sputtering system, and then the films were annealed at 350 °C with rapid thermal annealing system in vacuum. The dielectric constant and loss of MgO–Ta 2 O 5 CCS thin films were plotted via 1500 micron-step measuring. The specific point of Ta 2 O 5 –MgO CCS thin film (post annealed at 350 °C) showing superior dielectric properties of high dielectric constant ( k ∼ 28) and low dielectric loss (tan δ 2 O 5 side on the substrate. The cation's composition of thin film was Mg:Ta = 0.4:2 at%. |
| Databáze: | OpenAIRE |
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