Micro- and Nano-Structures for High-End Optics
| Autor: | Frank Burmeister, Martin Heusinger, Uwe D. Zeitner, Thomas Fluegel-Paul |
|---|---|
| Rok vydání: | 2019 |
| Předmět: | |
| Zdroj: | 2019 24th Microoptics Conference (MOC). |
| Popis: | Novel technology developments allow the fabrication of optical micro- and nano-structures on application relevant areas with extreme precision and high flexibility. The contribution reviews the technological challenges, demonstrates suitable solutions, and gives an insight into today’s high-end applications of such lithographically realized structures. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|