High resolution X-ray scattering investigation of Pt/LaF3/Si(111) structures
| Autor: | A. A. Nefedov, Werner Moritz, N. Jedrecy, S. S. Fanchenko |
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| Rok vydání: | 1998 |
| Předmět: |
Materials science
Scattering business.industry X-ray Analytical chemistry chemistry.chemical_element High resolution Condensed Matter Physics Electronic Optical and Magnetic Materials Optics chemistry Texture (crystalline) Electrical and Electronic Engineering Small-angle scattering Platinum business Layer (electronics) Beam (structure) |
| Zdroj: | Physica B: Condensed Matter. 248:48-52 |
| ISSN: | 0921-4526 |
| DOI: | 10.1016/s0921-4526(98)00201-4 |
| Popis: | Recently developed high resolution X-ray methods have been used to characterize the structure of Pt/LaF 3 /Si samples. The asymptotic Bragg di⁄raction is used for the study of the LaF 3 /Si interface and the grazing-incidence X-ray di⁄raction (GIXD) for the study of the LaF 3 texture. The LaF 3 /Si interface was found to be thin and smooth with the interface thickness value 0.55$0.1 nm. The essential extra-broadening of the main peak in di⁄raction experiments for samples with the top platinum layer is explained by the small angle scattering of the X-ray beam on the rough Pt film. The LaF 3 -film domain structure is derived from GIXD data. ( 1998 Elsevier Science B.V. All rights reserved. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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