An X-ray diffraction technique for analyzing structural defects including microstrain in nitride materials

Autor:	Qing Paduano, David W. Weyburne, Alvin Drehman
Rok vydání:	2011
Předmět:	Diffraction Materials science Aluminium nitride business.industry Computation Gallium nitride Nitride Condensed Matter Physics Coherence length Inorganic Chemistry chemistry.chemical_compound Optics chemistry Lattice (order) X-ray crystallography Materials Chemistry business
Zdroj:	Journal of Crystal Growth. 318:418-422
ISSN:	0022-0248
DOI:	10.1016/j.jcrysgro.2010.10.019
Popis:	An X-ray diffraction analysis technique incorporating microstrain broadening is introduced to characterize nitride materials. The technique is tested using GaN and AlN samples prepared with different growth processes. The computation technique relies on simultaneously analyzing the X-ray profiles from a series of crystal planes and extracting the various broadening effects. An analysis ignoring the mircostrain term will often overestimate the effects of lattice tilt and lateral coherence length. The extended analysis results in much better fits, especially for planes with large Bragg angles. Improved estimates give a more complete picture of the structural properties of nitride materials.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0f7c223b3d59911d3c6e5d5547d76ccc https://doi.org/10.1016/j.jcrysgro.2010.10.019 Zobrazit plný text záznamu Full Text from ScienceDirect