New possibilities for phase-variation structural diagnostics of multiparametrical monocrystalline systems with defects
| Autor: | E. I. Bogdanov, M. G. Tolmachev, A. I. Nizkova, O. Yo. Gudymenko, V. Yu. Storizhko, V. P. Kladko, S. I. Olikhovskii, B.I. Hinko, I. I. Demchyk, V. B. Molodkin, V. V. Lizunov, S. V. Dmitriev |
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| Rok vydání: | 2021 |
| Předmět: |
Monocrystalline silicon
Materials science 0103 physical sciences 02 engineering and technology Electrical and Electronic Engineering 021001 nanoscience & nanotechnology 010306 general physics 0210 nano-technology 01 natural sciences Engineering physics Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials |
| Zdroj: | Semiconductor Physics, Quantum Electronics and Optoelectronics. 24:5-15 |
| ISSN: | 1605-6582 1560-8034 |
| Popis: | Fundamental new features and physical nature of possibilities for purposeful influence of interrelated variations in different experimental conditions on changes of the selectivity of sensitivity of azimuthal dependence of the total integrated intensity dynamical diffraction to various types of defects in single crystals have been determined. As a result, the efficiency of the previously developed phase-variation principles of diagnostics has been improved. The proposed approach enabled us to demonstrate the presence of additional types of defects in the single crystals under study and to determine the defects parameters (sizes and concentrations). It makes it possible to obtain additional sensitivity and informativeness for phase-variation structure multiparametrical non-destructive diagnostics of monocrystalline systems with defects of various types. |
| Databáze: | OpenAIRE |
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