Design and FEM simulation study of a microflow sensor based on piezoresistive PDMS composite for microfluidic systems
| Autor: | Mohamed El-Amine Benamar, Asmaa Leila Sabeha Hassein-Bey, Burhanuddin Yeop Majlis, Nadir Belgroune, Rafik Serhane, A. Tahraoui, Abdelkader Hassein-bey |
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| Rok vydání: | 2016 |
| Předmět: |
Microelectromechanical systems
Engineering Microchannel business.industry Multiphysics 010401 analytical chemistry Microfluidics Mechanical engineering Laminar flow 02 engineering and technology 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Piezoresistive effect Finite element method 0104 chemical sciences Electronic Optical and Magnetic Materials Transducer Hardware and Architecture Electronic engineering Electrical and Electronic Engineering 0210 nano-technology business |
| Zdroj: | Microsystem Technologies. 23:1275-1284 |
| ISSN: | 1432-1858 0946-7076 |
| DOI: | 10.1007/s00542-016-2891-6 |
| Popis: | An electrical response of a microflow sensor would open a wide horizon of uses and should intensify the integration of MEMS (Micro-Electro-Mechanical-System) microfluidic-based LOC (Lab-On-Chip). This paper presents an original microflow sensor which will be able to measure a low fluid flow rate. The sensor is designed and optimized using a multiphysics modelling and FEM (Finite Element Method) simulations implemented on Comsol Multiphysics software. The sensing element made of CPDMS (Conductive PolyDiMethylSiloxane) consists in microbridge suspended into PDMS microchannel. The microbridge acts as a transducer. It converts the mechanical bending due to a fluid flow to an electrical signal using the piezoresistive property of the CPDMS. The numerical simulation results show that under specific geometrical parameters, the sensor has a sensitivity of 0.12 % mlź1 min for low flow rates. Furthermore, the simulation results also show that the laminar aspect of the flow is maintained and to avoid the strangling effect, a good equilibrium must be achieved between the microchannel height and the desired range of the microbridge dimensions. This work opens a horizon for microfluidic devices to measure a low flow rate using a piezoresistive effect giving access to an electrical response. |
| Databáze: | OpenAIRE |
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