Study of electrical current reconstruction on macropore arrays etched electrochemically on lightly-doped n-Si
| Autor: | Xiao-Qiang Fan, Yong Jiang, Changyong Zhan, Wen Jiang, Xing-Liang Li, Jian-Chun Wu, Hua Sun, Yu Zou, Qijie Feng |
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| Rok vydání: | 2016 |
| Předmět: |
Materials science
Silicon Macropore 020209 energy Doping Analytical chemistry General Physics and Astronomy chemistry.chemical_element 02 engineering and technology Surfaces and Interfaces General Chemistry 021001 nanoscience & nanotechnology Condensed Matter Physics Finite element method Surfaces Coatings and Films Electrical current chemistry Electric field 0202 electrical engineering electronic engineering information engineering Composite material Current (fluid) 0210 nano-technology Voltage |
| Zdroj: | Applied Surface Science. 362:538-544 |
| ISSN: | 0169-4332 |
| DOI: | 10.1016/j.apsusc.2015.11.127 |
| Popis: | Silicon macropore arrays are fabricated on lightly-doped n-Si by electrochemical etching. The opening diameter, inner diameter, and wall thickness of the macropores are observed to depend on HF concentration and current. A current reconstruction model is proposed to elucidate the formation mechanism of the macropores. Two geometric models are established for the silicon macropores according to the experimental results. The finite element method is used to simulate the electric field and current in the electrolyte-silicon system. The reconstruction of electrical current on the silicon macropore arrays is described by simulating the electric field and current. The ratio of major to minor semi-axes of the elliptical pore ( b / a ) decreases with increasing the ratio of diameter to wall thickness as confirmed experimentally. The results indicate that the b / a ratio is correlated with the HF concentration and applied voltage. |
| Databáze: | OpenAIRE |
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