Design and Performance of a Microengine Realized with Arrays of Asymmetrical Electrothermal Polysilicon Surface Micromachined Microactuators

Autor: Josh M. Wilken, Simon Y. Ko, Jeffery T. Howard, Justin B McAllister, Matthew D. Ruff, Peter B. Allen, Jorge E. Bosch, Joseph A. Jayachandran, Edward S. Kolesar, Richard J. Wilks, Noah C. Boydston, William E. Odom
Rok vydání: 2002
Předmět:
Zdroj: MRS Proceedings. 741
ISSN: 1946-4274
0272-9172
DOI: 10.1557/proc-741-j5.3
Popis: This research focuses on the design and experimental characterization of two types of MEMS asymmetrical electrothermal microactuators. Both microactuator design variants use resistive (Joule) heating to generate thermal expansion and movement. Deflection and force measurements of both microactuators as a function of applied electrical power are presented. Also described is the practical integration of the electrothermal microactuators in a monolithic microengine that is capable of rotating a set of gears.
Databáze: OpenAIRE
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