Autor: |
M. Fujioka, Hiroko Ishii, Taichi Miura, Eishi Tanaka, Mitsuo Koizumi, Toshiaki Sekine, Hisakazu Muramatsu, Akihiko Osa |
Rok vydání: |
1998 |
Předmět: |
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Zdroj: |
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 134:126-135 |
ISSN: |
0168-583X |
DOI: |
10.1016/s0168-583x(98)80042-6 |
Popis: |
A simple retardation system has been constructed in order to realize low-energy ion-implantations using an electro-magnetic isotope separator (EMIS). Mass-separated ions are decelerated through a smoothly increasing potential which is produced in a box which is coated inside with a highly resistive film. To test the performance of the system, 133Xe ions retarded from 20 keV by a maximum of 15 keV were implanted into a nickel foil covered by a thin copper layer, and their mean range in copper was determined with a radiochemical technique. The observed ranges are in good agreement with theoretical prediction, which manifests that the system works well as expected. |
Databáze: |
OpenAIRE |
Externí odkaz: |
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