Highly Reliable Piezoelectric Process Technology in Volume Foundry for Emerging Mems Applications
| Autor: | Alexander Kalnitsky, Huang Shih-Fen, Benior Chen, Hu Fan, Terrence Yu, Sean Cheng, Leo Tsai, Lin Anderson, Victor Shih, Vincent Teng, Yeur-Luen Tu, Lin You-Ru, Huang Fu-Chun, Yi-Heng Tsai, Ching-Hui Lin, Julian Lee, Lee-Chuan Tseng, Chen Yen-Wen, Liao Yan-Jie, Ching-Hua Chiu, Kelvin Tai, Chih-Ming Chen, Chang Kai-Fung |
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| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Microelectromechanical systems Computer science 010401 analytical chemistry Electrical breakdown Time-dependent gate oxide breakdown 01 natural sciences Piezoelectricity Automotive engineering 0104 chemical sciences Controllability Robustness (computer science) 0103 physical sciences Foundry Actuator |
| Zdroj: | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII). |
| Popis: | This work presents the piezoelectric process technology developed in a high volume foundry for emerging MEMS applications. Innovative reliability enhancement techniques for piezoelectric devices are demonstrated to significantly boost (1) dielectric breakdown voltage from 30V to 110V, (2) time-dependent-dielectric-breakdown lifetime by 100X, (3) temperature-humidity-bias stress robustness (0% failure achieved), and (4) PZT imprint and fatigue controllability (99% recovery from imprint achieved) to fulfill stringent reliability and piezoelectric performance stability criteria for emerging MEMS applications in Internet of Things (IoT) era. |
| Databáze: | OpenAIRE |
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