Quantification of dopant species using atom probe tomography for semiconductor application

Autor:	Jang Jung Lee, Shih‐Che Chen, Yi‐Hsiang Lin, Shih‐Wei Hung, Wai Kong Yeoh
Rok vydání:	2019
Předmět:	Materials science Dopant business.industry Surfaces and Interfaces General Chemistry Atom probe Condensed Matter Physics Surfaces Coatings and Films law.invention Semiconductor law Materials Chemistry Optoelectronics business
Zdroj:	Surface and Interface Analysis. 52:318-323
ISSN:	1096-9918 0142-2421
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0eed2f89f0c969758dcd272900b816ef https://doi.org/10.1002/sia.6706 Zobrazit plný text záznamu Plný text