Plasma Interaction with Boundary Surfaces in Low-Pressure Radio-Frequency Capacitive Discharge

Autor:	M. S. Kruglov, A. V. Chervyakov, V. G. Yakunin, V. P. Savinov, V. A. Riaby
Rok vydání:	2019
Předmět:	Physics Imagination Nuclear and High Energy Physics Chemical substance media_common.quotation_subject Boundary (topology) Plasma Electron LC circuit Atomic and Molecular Physics and Optics Physics::Plasma Physics Radio frequency Atomic physics Excitation media_common
Zdroj:	Physics of Atomic Nuclei. 82:1433-1436
ISSN:	1562-692X 1063-7788
DOI:	10.1134/s106377881910017x
Popis:	A particular case of a problem on interaction of plasma with a surface is examined experimentally. We study interaction of its own plasma with boundary surfaces in a low-pressure radio-frequency (RF) capacitive discharge (RFCD) by considering their functions. On the basis of the physical model of RFCD substantiated earlier, we examine experimentally the physical conditions taking place in a near-electrode layer of space discharge, which lead to formation of pulsed electron beams and highly non-equilibrium plasma electron energy spectrum. We verify experimentally the known fact that in RFCD it is possible to generate natural oscillating LC circuits modulating the discharge current, and the conditions of their excitation by their own electron beams are clarified.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0ee92ba2ff242a741c5e44c00cc357db https://doi.org/10.1134/s106377881910017x Zobrazit plný text záznamu Plný text ve formátu PDF