Soft and Flexible 3D-Structured Device with Crack-Free Metal Patterns
| Autor: | Sohee Kim, Hyunmin Moon |
|---|---|
| Rok vydání: | 2020 |
| Předmět: |
Microelectromechanical systems
Flexibility (engineering) 0303 health sciences Materials science Fabrication Biocompatibility Parylene C Nanotechnology 02 engineering and technology 021001 nanoscience & nanotechnology Crack free Metal 03 medical and health sciences visual_art visual_art.visual_art_medium 0210 nano-technology Electrical conductor 030304 developmental biology |
| Zdroj: | 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS). |
| DOI: | 10.1109/mems46641.2020.9056341 |
| Popis: | This paper proposes a fabrication technique of 3-dimensional (3D) soft and flexible devices with embedded crack-free metal patterns. After the selective bonding between PDMS and parylene-C, additional MEMS techniques such as patterning of conductive lines and pads can be processed on a 2D plane before the transformation into a 3D structure. Moreover, the fabrication processes have been optimized to achieve crack-free metal patterns, because the microcracks in metal patterns could affect the electrical connections and the life-time of soft and flexible devices. Based on the advantageous material characteristics such as flexibility, softness, and biocompatibility, the 3D-structured devices are expected to be used as implantable biomedical devices for various prospective applications. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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