Reduction in roughness of resist features in PMMA due to the absence of rinsing step

Autor:	M.N. Khalid, S. Yasin, D.G. Hasko, H. Ahmed
Rok vydání:	2004
Zdroj:	Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference.
DOI:	10.1109/imnc.2003.1268521
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0ec5598b68c22d1319cbbf7edae61b66 https://doi.org/10.1109/imnc.2003.1268521 Zobrazit plný text záznamu