Scanning probe microscopy of AlGaAs/GaAs diode after partial electrical breakdown

Autor: Prokhor A. Alekseev, A A Podoskin, Mikhail S. Dunaevskiy, A O Mikhaylov, Sergey O. Slipchenko
Rok vydání: 2018
Předmět:
Zdroj: Journal of Physics: Conference Series. 1124:081013
ISSN: 1742-6596
1742-6588
Popis: Scanning probe microscopy allows to study surface processes in semiconductor heterostructures. This work shows the investigation of topography and surface potential distribution in AlGaAs/GaAs p-n diode after applied reverse voltage. Formation of oxide on the surface in the area of p-n junction was found due to increasing of the applied reverse voltage. Formed oxide increases a breakdown voltage by 20%.
Databáze: OpenAIRE