Scanning probe microscopy of AlGaAs/GaAs diode after partial electrical breakdown
Autor: | Prokhor A. Alekseev, A A Podoskin, Mikhail S. Dunaevskiy, A O Mikhaylov, Sergey O. Slipchenko |
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Rok vydání: | 2018 |
Předmět: | |
Zdroj: | Journal of Physics: Conference Series. 1124:081013 |
ISSN: | 1742-6596 1742-6588 |
Popis: | Scanning probe microscopy allows to study surface processes in semiconductor heterostructures. This work shows the investigation of topography and surface potential distribution in AlGaAs/GaAs p-n diode after applied reverse voltage. Formation of oxide on the surface in the area of p-n junction was found due to increasing of the applied reverse voltage. Formed oxide increases a breakdown voltage by 20%. |
Databáze: | OpenAIRE |
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