Rapid thermal annealing of sol‐gel derived lead zirconate titanate thin films

Autor:	Jen Ming Chen, K. G. Brooks, L. E. Cross, K. R. Udayakumar
Rok vydání:	1992
Předmět:	Permittivity Materials science Annealing (metallurgy) General Physics and Astronomy Mineralogy Dielectric Coercivity Lead zirconate titanate Ferroelectricity chemistry.chemical_compound chemistry Thin film Composite material Perovskite (structure)
Zdroj:	Journal of Applied Physics. 71:4465-4469
ISSN:	1089-7550 0021-8979
DOI:	10.1063/1.350789
Popis:	Sol‐gel derived ferroelectric thin films of lead zirconate titanate have been annealed through the rapid thermal annealing (RTA) technique to investigate the effect of various annealing temperature‐time combinations. Crystallization of the film into the perovskite phase required 10 s at 600 °C and a mere 1 s at 700 °C. Rapid thermally annealed films recorded weak‐field permittivities greater than 1000, dissipation losses of 0.02–0.05, maximum remanent polarization of 29 μC/cm2, and coercive field around 40 kV/cm. RTA films are distinguished by superior breakdown strengths, and morphologically smoother surfaces. The frequency dependent dielectric constants have been discussed in terms of a lumped circuit model.
Databáze:	OpenAIRE
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