| Autor: |
E. Tomerov, G. Stavreva, Dimitar Chakarov, V. Stavrov, Y. Tsenkov, Assen Shulev |
| Rok vydání: |
2017 |
| Předmět: |
|
| Zdroj: |
2017 IEEE 23rd International Symposium for Design and Technology in Electronic Packaging (SIITME). |
| DOI: |
10.1109/siitme.2017.8259852 |
| Popis: |
Some results in characterization of two contact MEMS position sensors with sidewall piezoresistors are presented. Devices with in-plane travel range of about 50pm comprise of one and the same symmetrical transducer with two Π-shaped flexures. For first time, just by means of different configuration of the same sidewall piezoresistors in the same flexures, position sensors which are selectively sensitive in X or Y direction were prototyped and tested. Experimentally measured ratio of the displacement sensitivities in Y vs. X direction of the first type sensor was 16.5 and same ratio of the sensitivities in X vs. Y direction of the second type was 27.6. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
|
