Experimental investigation of damping factors in 20% scandium-doped aluminum nitride laterally vibrating resonators
| Autor: | Gianluca Piazza, Zachary Schaffer, Sergey Mishin, Abhay Kochhar, Luca Colombo, Yury Oshmyansky |
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| Rok vydání: | 2018 |
| Předmět: |
Materials science
Doping chemistry.chemical_element 020206 networking & telecommunications 02 engineering and technology Nitride 01 natural sciences Resonator Thermoelastic damping chemistry Aluminium 0103 physical sciences Thermal Electrode 0202 electrical engineering electronic engineering information engineering Scandium Composite material 010301 acoustics |
| Zdroj: | 2018 IEEE Micro Electro Mechanical Systems (MEMS). |
| DOI: | 10.1109/memsys.2018.8346673 |
| Popis: | This paper reports experimental investigation of damping factors for 20% Scandium-doped Aluminum Nitride (ScAlN) laterally vibrating resonators (LVRs). ScAlN films for LVRs are very promising since they enable greater electromechanical coupling (k t 2) than undoped AlN films (∼ 2X for 20% doping), but have generally exhibited lower quality factors (Qs) [1,2]. This work is the first to study what damping factors impact the performance of these devices and provide preliminary design guidelines to attain high Qs. Different ScAlN LVR geometries are analyzed and devices tested in air, under vacuum, and at cryogenic temperatures (11 K). Anchor losses and thermoelastic damping (TED) are evaluated and compared to AlN LVRs. Similarities in thermal scaling of Qs in ScAlN resonators indicate that the source of TED is similar to AlN devices. |
| Databáze: | OpenAIRE |
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