| Popis: |
The axial distribution of the plasma potential, concentration and temperature of electrons in an RF capacitive plasma source with the geometry of an accelerator with a closed electron drift is experimentally investigated in this work. Two cases of the external electrical discharge circuit are considered. In the first case, the electrodes were closed by direct current, in the second, they were opened. It is shown that direct current closure of the electrodes leads to a significant increase in the plasma potential and electron concentration. In a number of cases, local maxima of temperature and plasma density are observed near the electrodes, which can be associated with the occurrence of azimuthal electron drift in crossed electric and magnetic fields. |
