Some Observations on Conduction through Thin Tantalum Oxide Films

Autor:	L. I. Maissel, C. L. Standley
Rok vydání:	1964
Předmět:	Tantalum capacitor chemistry.chemical_compound chemistry Anodizing Schottky effect Electrode Tantalum Oxide General Physics and Astronomy Schottky diode chemistry.chemical_element Composite material Evaporation (deposition)
Zdroj:	Journal of Applied Physics. 35:1530-1534
ISSN:	1089-7550 0021-8979
Popis:	The electrical properties of several tantalum oxide diodes with various metal counterelectrodes have been studied. The devices were prepared on sputtered tantalum by anodizing to the desired oxide thickness (100–200 A) and evaporating the second metal electrode in vacuum. The devices show a work function dependence on the second metal electrode that also appears to be affected by the manner in which the original tantalum was prepared. The temperature behavior of this and several other oxide diode systems follow a Schottky relation fairly well, with deviations at low temperatures and thinner oxide layers, as expected.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0e8f0faeab1614179b9411c89ceede5f https://doi.org/10.1063/1.1713661 Zobrazit plný text záznamu