Monolithically integrated VCSELs and photodetectors for microsystem applications

Autor:	J.J. Hindi, B.E. Hammous, J. A. Nevers, Kent D. Choquette, A. A. Allerman, Kent M. Geib
Rok vydání:	2002
Předmět:	Materials science business.industry Photoconductivity Photodetector Distributed Bragg reflector Laser Vertical-cavity surface-emitting laser law.invention Optics law Etching (microfabrication) Microsystem Optoelectronics Integrated optics business
Zdroj:	Conference Proceedings. LEOS'98. 11th Annual Meeting. IEEE Lasers and Electro-Optics Society 1998 Annual Meeting (Cat. No.98CH36243).
DOI:	10.1109/leos.1998.739443
Popis:	Summary form only given. We have fabricated integrated resonated cavity photodetectors with selectively oxidized VCSELs by etching away a portion of the top distributed Bragg reflector mirror of nominally 850 nm VCSEL lasers.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0e86eb6dab401020a418ae1d27524212 https://doi.org/10.1109/leos.1998.739443 Zobrazit plný text záznamu