Capacitive micromachined ultrasonic transducer based tilt sensing

Autor:	Ming Lin Tsai, Kuruveettil Haridas, Hongbin Yu, Tack Boon Yee, Jia Hao Cheong, Tsu-Hui Lin, Bin Guo
Rok vydání:	2012
Předmět:	Surface micromachining Time of flight Tilt (optics) Capacitive micromachined ultrasonic transducers Transducer Materials science Physics and Astronomy (miscellaneous) business.industry Acoustics Capacitive sensing Ultrasound Ultrasonic sensor business
Zdroj:	Applied Physics Letters. 101:153502
ISSN:	1077-3118 0003-6951
DOI:	10.1063/1.4757998
Popis:	In this paper, a tilt sensing mechanism based on the capacitive micromachined ultrasound transducers (CMUTs) is presented. By measuring the difference in the time of flight of various pulse-echo signals from different CMUT transmitting elements to one common receiving element in the oil bath, the tilt angle of the oil surface can be determined. With the proposed device, the maximum tilt angles of 20° and 28° have been measured in the clockwise and counterclockwise directions, respectively, and the difference between the measured and the theoretical values of the tilt angle was found to be within 0.05° during the whole test.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0e815f9632c0a3f6e55a0b062f191fff https://doi.org/10.1063/1.4757998 Zobrazit plný text záznamu