Crystallization Behavior of Zinc-Doped Nb2O5 Thin Films Synthesized by Atomic Layer Deposition

Autor:	Alexander C. Kozen, Jeffrey M. Woodward, Laura B. Ruppalt, Hans Cho, Carl A. Ventrice, Andrew H. Rowley, Nicole Zhe, Alex Mesiti, Emma Sargent, James H. Michels, Zachary R. Robinson
Rok vydání:	2022
Předmět:	Materials Chemistry Electrochemistry Electronic Optical and Magnetic Materials
Zdroj:	ACS Applied Electronic Materials. 4:4280-4287
ISSN:	2637-6113
DOI:	10.1021/acsaelm.2c00446
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0e800cc95dddd52a0d1ab066681a2e4d https://doi.org/10.1021/acsaelm.2c00446 Zobrazit plný text záznamu