Compact Coating Machine for Large Laser Optics with a New Thickness-Distribution Equalization Method
| Autor: | Kunio Yoshida, Hidehiko Fujimura, Junri Ishikura, Minoru Otani |
|---|---|
| Rok vydání: | 2004 |
| Předmět: |
Spin coating
Materials science Physics and Astronomy (miscellaneous) Distribution (number theory) business.industry General Engineering Equalization (audio) Evaporation General Physics and Astronomy engineering.material Laser optics Vacuum evaporation Optics Optical coating Coating engineering business |
| Zdroj: | Japanese Journal of Applied Physics. 43:305-306 |
| ISSN: | 1347-4065 0021-4922 |
| DOI: | 10.1143/jjap.43.305 |
| Popis: | A compact coating machine with which large optics up to 1000 mm in diameter and 300 kg in weight can be coated uniformly is presented. In order to achieve a uniform thickness distribution within the compact coating chamber, we devised a new thickness equalization method that utilizes a rotating mask between an evaporation source and a large rotating optics at the center of the coating chamber. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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