Fabrication of micro-nano structure Se-doped silicon via picosecond laser irradiation assisted by dopant film

Autor:	Lingyan Du, Jie Yin, Wei Zeng, Shangzhen Pang, Hao Yi
Rok vydání:	2023
Předmět:	Mechanics of Materials Mechanical Engineering General Materials Science Condensed Matter Physics
Zdroj:	Materials Letters. 331:133463
ISSN:	0167-577X
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0e2ba30b7b2e6965f017211137c561df https://doi.org/10.1016/j.matlet.2022.133463 Zobrazit plný text záznamu Full Text from ScienceDirect