Pd–Ni–P metallic glass pattern with controllable microstructure fabricated by electroless alloy plating
| Autor: | Chiemi Ishiyama, Akinobu Shibata, Toshikazu Tasaki, Tso-Fu Mark Chang, Masato Sone, Nobuyuki Yoshida |
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| Rok vydání: | 2011 |
| Předmět: |
Materials science
Amorphous metal Nanostructure Metallurgy Alloy Core (manufacturing) Substrate (electronics) engineering.material Condensed Matter Physics Microstructure Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Catalysis Plating engineering Electrical and Electronic Engineering Composite material |
| Zdroj: | Microelectronic Engineering. 88:2401-2404 |
| ISSN: | 0167-9317 |
| DOI: | 10.1016/j.mee.2011.02.081 |
| Popis: | A method to control nanostructure of metallic glass film (MGF) fabricated by electroless alloy plating (ELAP) is proposed. The nanostructure is controlled by density of catalyst core on a substrate, and which is a function of immersion time in catalyst solution. MGF patterning was performed successfully, and the characteristic nanostructure was observed by TEM. For ELAP process, density of catalyst core was decreased with increasing immersion time, while size of the core was enlarged. Nanostructures were refined with increase in catalyst core density. These results show that nanostructure of MGF pattern can be controlled by Pd catalyst density in the ELAP process. |
| Databáze: | OpenAIRE |
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