A Tunable MEMS Magnetic Sensor
| Autor: | Majed Al-Ghamdi, Eihab M. Abdel-Rahman, M E Khater, Sangtak Park |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
Microelectromechanical systems Materials science business.industry Dynamic range Mechanical Engineering Biasing 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Magnetic field Vibration symbols.namesake MEMS magnetic field sensor 0103 physical sciences symbols Optoelectronics Electrical and Electronic Engineering 0210 nano-technology business Lorentz force DC bias |
| Zdroj: | Journal of Microelectromechanical Systems. 26:255-263 |
| ISSN: | 1941-0158 1057-7157 |
| Popis: | This paper introduces a tunable MEMS magnetic field sensor. It uses torsional vibrations excited by Lorentz force to measure the strength of external magnetic fields. The sensor sensitivity and dynamic range can be tuned on-the-fly by varying its dc bias. Experimental demonstration shows that the sensor sensitivity can be tuned in the range of 0.139-0.283V/mT as the bias voltage varies from 0 to 6V in air and in the range of 0.038-0.955V/mT as the bias voltage varies from 0 to 5V in vacuum. While the sensor can operate in either a forced or a resonant mode, it achieves higher sensitivity and bandwidth when operating near its first torsional resonance. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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