The effect of magnetic field configuration on structural and mechanical properties of TiN coatings deposited by HiPIMS and dcMS
Autor: | Mohammed Makha, Youssef Tamraoui, Hicham Larhlimi, Anas Ghailane, Heinz Busch, Jones Alami, Christian B. Fischer |
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Rok vydání: | 2020 |
Předmět: |
010302 applied physics
Materials science chemistry.chemical_element 02 engineering and technology Surfaces and Interfaces General Chemistry Sputter deposition 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Titanium nitride Indentation hardness Surfaces Coatings and Films Corrosion chemistry.chemical_compound chemistry Residual stress 0103 physical sciences Materials Chemistry Surface roughness Composite material High-power impulse magnetron sputtering 0210 nano-technology Tin |
Zdroj: | Surface and Coatings Technology. 404:126572 |
ISSN: | 0257-8972 |
Popis: | The quality of coatings deposited by magnetron sputtering is known to depend on, among others, the magnetic field strength (Φ) and the magnetic field configuration. Furthermore, high power impulse magnetron sputtering (HiPIMS) is known to result in low defect - high density coatings, and is therefore used to deposit barrier coatings against wear and corrosion. The influence of varying the Φ, on deposition rate (R), structure and hardness of titanium nitride coatings prepared by HiPIMS and dc magnetron sputtering (dcMS) was investigated. At 22mT, the ratio between HiPIMS deposition rate and dcMS deposition rate (RHiPIMS/RdcMS) was almost equal to 1. As Φ was increased from 22mT to 35mT, R decreased by 28% for HiPIMS and increased by 15.6% for dcMS, and RHiPIMS/RdcMS was reduced from 1 to 0.63. From 35mT to 44mT, the decrease in R slowed to 6% for HiPIMS and to 12.5% for dcMS. The (111) orientation was dominant over (200) orientation for both HiPIMS and dcMS, and become less dominant with the Φ in the case of dcMS. The residual stresses and surface roughness were determined and their evolution with Φ is highlighted. Mechanical characterization of the deposited coatings was performed, where the hardness tests showed that on average the HiPIMS coatings (29-34GPa) were some 5 GPa harder than dcMS coatings (25-27GPa). |
Databáze: | OpenAIRE |
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