Experimental and numerical analyses of electron temperature and density distributions in a magnetic neutral loop discharge plasma

Autor:	Chikahisa Honda, Masahisa Otsubo, Yaw Okraku-Yirenkyi, Tatsuya Sakoda, Youl-Moon Sung
Rok vydání:	2001
Předmět:	Electron density Field (physics) Chemistry Electron temperature Plasma diagnostics Electromagnetic electron wave Surfaces and Interfaces Electron Plasma Atomic physics Condensed Matter Physics Surfaces Coatings and Films Magnetic field
Zdroj:	Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 19:2590-2595
ISSN:	1520-8559 0734-2101
DOI:	10.1116/1.1397467
Popis:	In order to study the plasma structure and its application to processing, experimental and numerical analyses of the distribution of the electron temperature (Te) and electron density (ne) in a neutral loop discharge (NLD) plasma were performed. From the experiments, NLD plasma possesses Te and ne peaks. In the cases of NL radii of RNL=80, 100, and 120 mm, the maximum values measured for Te were around the NL. However, the ne peaks of the cases mentioned were located about 30–40 mm radially inward of the NL. We calculated the electron behavior in three dimensions to analyze these measured results, taking into consideration the actual experimental conditions such as the magnetic field, antenna position, and chamber walls. We found electrons are trapped in a region that is more inward of the NL due to a mirror field that causes the peak of ne. Also it is shown that good plasma uniformity could be obtained by dynamically controlling these Te and ne peaks.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0db480a0dd725ddf654ee158f49dcadc https://doi.org/10.1116/1.1397467 Zobrazit plný text záznamu