30-2: The Crystallization Monitor: Enabling Accurate Metrology of Excimer-Laser Annealed Si Films

Autor:	Sven Passinger, Paul C. van der Wilt
Rok vydání:	2017
Předmět:	Materials science Excimer laser law business.industry medicine.medical_treatment Electronic engineering Laser crystallization medicine Optoelectronics Crystallization business Metrology law.invention
Zdroj:	SID Symposium Digest of Technical Papers. 48:422-425
ISSN:	0097-966X
DOI:	10.1002/sdtp.11652
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0d8fcb26de72cb31782c6cda13acc2dc https://doi.org/10.1002/sdtp.11652 Zobrazit plný text záznamu Plný text