Lower-Submicron Patterning Process for BiSrCaCuO High-Tc Superconducting Thin Films
| Autor: | Shuji Fujiwara, Hiroaki Furukawa, Masao Nakao, Ryokan Yuasa, Shigeo Suzuki |
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| Rok vydání: | 1992 |
| Předmět: | |
| Zdroj: | Extended Abstracts of the 1992 International Conference on Solid State Devices and Materials. |
| DOI: | 10.7567/ssdm.1992.pd4-1 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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