Ultra-hard AlMgB14 coatings fabricated by RF magnetron sputtering from a stoichiometric target

Autor:	Sergiy Khartsev, Alexander M. Grishin, Johan Böhlmark, Mats Ahlgren
Rok vydání:	2015
Předmět:	Fabrication Materials science Physics and Astronomy (miscellaneous) business.industry chemistry.chemical_element Substrate (electronics) Sputter deposition chemistry Sputtering Aluminium visual_art visual_art.visual_art_medium Optoelectronics Ceramic business Penetration depth Stoichiometry
Zdroj:	JETP Letters. 100:680-687
ISSN:	1090-6487 0021-3640
DOI:	10.1134/s0021364014220056
Popis:	For the first time hard aluminum magnesium boride films were fabricated by RF magnetron sputtering from a single stoichiometric ceramic AlMgB14 target. Optimized processing conditions (substrate temperature, target sputtering power and target-to-substrate distance) enable fabrication of stoichiometric in-depth compositionally homogeneous films with the peak values of nanohardness 88 GPa and Young’s modulus 517 GPa at the penetration depth of 26 nm and, respectively, 35 and 275 GPa at 200 nm depth in 2 μm thick film.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0d685a8424f97c3afed03e5a4f36cb42 https://doi.org/10.1134/s0021364014220056 Zobrazit plný text záznamu Plný text ve formátu PDF