Quartz Resonators for Monitoring Thin-Film Mass and Thickness

Autor:	L. K. Gribova, V. E. Savchenko, A. V. Sorokin
Rok vydání:	2005
Předmět:	Condensed Matter::Materials Science Materials science Optics Rigidity (electromagnetism) business.industry Applied Mathematics Quartz resonator Optoelectronics Thin film business Instrumentation Quartz
Zdroj:	Measurement Techniques. 48:146-150
ISSN:	1573-8906 0543-1972
DOI:	10.1007/s11018-005-0113-1
Popis:	A detailed analysis is presented for a quartz resonator-film system that substantially improves the accuracy in determining the mass and thickness. A proposed method of measuring the mass and other physical properties of the films is tested by experiment, which does not require preliminary calibration.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0d5beab3b605a7ff18484ff6ce4dd5ac https://doi.org/10.1007/s11018-005-0113-1 Zobrazit plný text záznamu Full text from SpringerLink