Analysis of electrical measurements of ion implanted layers in semiconductors

Autor: A W Tinsley, P R C Stevens
Rok vydání: 1971
Předmět:
Zdroj: Journal of Physics C: Solid State Physics. 4:L150-L153
ISSN: 0022-3719
DOI: 10.1088/0022-3719/4/9/003
Popis: In the analysis of electrical measurements on ion implanted layers in semi-conductors it is important to take account of the possibility of incomplete donor or acceptor ionization, and the fact that the material is likely to degenerate. Methods for computing these effects and the effect of mobility variation with depth are presented.
Databáze: OpenAIRE