Multi-layered circuit board precisely pressed/damascened on glass plates

Autor:	Masayuki Nakao, Kiyoshi Matsumoto, Yotaro Hatamura, Jinyo Kumaki
Rok vydání:	2004
Předmět:	Pressed glass Pressing Printed circuit board chemistry.chemical_compound Materials science chemistry Tungsten carbide General Engineering Polished plate glass Copper interconnect Replication (microscopy) Composite material Flat glass
Zdroj:	Precision Engineering. 28:181-185
ISSN:	0141-6359
Popis:	The authors introduce a pressing/damascening replication process on glass plates. As a prototype replication, the 20 μm line-wide circuit pattern was experimented. A male-patterned tungsten carbide mold hot-pressed against a glass plate to replicate the female pattern on the glass. Then the copper was deposited on the pressed glass, and was polished flat to produce the same copper damascened pattern. Next the three-layered circuit board was stacked and fixed by hot-pressing with only 2 μm error in the line width.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0d1a27bd2d7ee18ce225b6d5b6afa3b0 https://doi.org/10.1016/j.precisioneng.2003.08.003 Zobrazit plný text záznamu Full Text from ScienceDirect