Enhanced Photoluminescence of Heavily Doped n-Ge/Si(001) Layers

Autor: N. A. Baidakova, D. O. Filatov, A. V. Zdoroveishev, D. S. Prokhorov, M. V. Dorokhin, V. Yu. Chalkov, S. A. Denisov, V. G. Shengurov, M. V. Ved, A. V. Zaitsev
Rok vydání: 2019
Předmět:
Zdroj: Semiconductors. 53:1262-1265
ISSN: 1090-6479
1063-7826
DOI: 10.1134/s1063782619090161
Popis: The photoluminescence spectra of epitaxial n+-Ge:P/Si(001) structures are studied. The structures are grown by hot-wire chemical vapor deposition and doped with phosphorus to the maximum electron concentration 1 × 1020 cm–3 from a source based on thermally decomposed GaP. The effects of the doping level and rapid thermal annealing of n+-Ge:P layers on the photoluminescence spectra are studied. It is demonstrated that the epitaxial n+-Ge:P/Si(001) layers grown by hot-wire chemical vapor deposition are promising for application as active regions of light-emitting optoelectronic devices operating in the near-infrared spectral region.
Databáze: OpenAIRE
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