Focused ion beam technology applied to microstructure fabrication

Autor:	Michael J. Vasile, Raja Nassar, Jushan Xie
Rok vydání:	1998
Předmět:	business.product_category Materials science Ion beam General Engineering Mechanical engineering Nanotechnology Microstructure fabrication Focused ion beam Machine tool Surface micromachining Component (UML) Ion milling machine business Microfabrication
Zdroj:	Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 16:2499
ISSN:	0734-211X
DOI:	10.1116/1.590198
Popis:	Focused ion beams (FIBs) have found a place in several research thrusts for the manufacture of mini or micro mechanical objects. This article reports the use of FIB in three distinct applications in microfabrication: prototype structures, micron-sized machine tools and microsurgical manipulators, and ion milling of three dimensional features. Examples of each of these applications are given with the FIB component identified as the enabling or critical component in the technology. The possibility of using FIB milling as part of a production method for micron-sized machine tools is discussed, and the mass production consequences of molds fabricated by three dimensional ion beam milling is also considered. The mathematical procedure and programming steps needed to accurately control FIB three dimensional milling are outlined.
Databáze:	OpenAIRE
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