Creation of Calibrated Samples of a Measure with Relief Elements Less Than 100 nm
| Autor: | Yu. M. Zolotarevskii, A. A. Samoilenko, K. N. Min’kov, V. L. Lyaskovskii, Yu. R. Efimenkov |
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| Rok vydání: | 2016 |
| Předmět: |
Materials science
business.industry Applied Mathematics 010401 analytical chemistry Scanning confocal electron microscopy Measure (physics) engineering.material 01 natural sciences Sample (graphics) 0104 chemical sciences law.invention 010309 optics Optics Coating Optical microscope Resist law 0103 physical sciences engineering Calibration Near-field scanning optical microscope business Instrumentation |
| Zdroj: | Measurement Techniques. 58:1214-1215 |
| ISSN: | 1573-8906 0543-1972 |
| DOI: | 10.1007/s11018-016-0872-x |
| Popis: | Results from the development of an experimental sample of a measure with relief elements less than 100 nm for use in calibration of optical, near-field, and electron microscopes based on a metallized electronic resist (coating) are presented. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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