Research on acoustic sensing device based on microfiber knot resonator

Autor:	Rongyu Zhao, Jiangong Cui, Yaxin Yu, Xiaoping Zhai, Xiaoxia Chu, Min Zhu, Bofeng Wu, Yuhua Yang, Renxin Wang, Changde He, Guojun Zhang, Wendong Zhang
Rok vydání:	2022
Předmět:	Mechanics of Materials Mechanical Engineering Electrical and Electronic Engineering Electronic Optical and Magnetic Materials
Zdroj:	Journal of Micromechanics and Microengineering. 32:085003
ISSN:	1361-6439 0960-1317
DOI:	10.1088/1361-6439/ac7842
Popis:	An acoustic sensor packaged with polydimethylsiloxane film sandwich structure is proposed in this paper. The sensor uses a flat glass with a square hole in the middle as the substrate structure. The cavity length of the microfiber knot resonator is significantly changed by the applied acoustic pressure, which is ultimately manifested as a change in the strength of the sensor signal. The sensor has a good response at frequencies from 0.1 to 10 kHz, and has a sensitivity of 0.92 mV Pa−1 at 1 kHz acoustic frequency. The sensor studied in this paper has the advantages of wide frequency band, small size and low cost, and has a good application prospect in the field of acoustic signal detection.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0cac7c9875cfa723e60968742b1d1c7b https://doi.org/10.1088/1361-6439/ac7842 Zobrazit plný text záznamu