| Autor: |
Seulgi Lee, I. M. Antropov, Sangwoo Bae, Akinori Ohkubo, Joo Won-Don, Aleksandr Shorokhov, Hosun Yoo, Anton Medvedev, Kyunghun Han, Taehyun Kim, Minhwan Seo, Boris I. Afinogenov, Jeang Eun-Hee, Vladimir O. Bessonov, Maksim Riabko, Lee Sang-Min, Anton N. Sofronov, Ingi Kim |
| Rok vydání: |
2020 |
| Předmět: |
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| Zdroj: |
Nonlinear Optics and its Applications 2020. |
| Popis: |
Detection of a single nanoparticle on a bare silicon wafer has been a challenge in the semiconductor industry for decades. Currently, the most successful and widely used technique is dark-field microscopy. However, it is not capable of detecting single sub-10 nm particles owing to a low signal-to-noise ratio (SNR). As a new approach, we suggest using the second harmonic generation (SHG) to detect a single nanoparticle. The second harmonic generation in centrosymmetric materials, like silicon, is forbidden except for a thin and additionally increase local field factors, allowing for their persistent detection. Choosing the proper surface and increasing SNR. We demonstrate the feasibility of the nonlinear dark-field microscopy concept by detecting an isolated 80-nm silicon nanoparticle on the silicon wafer. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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