Novel Texture Etch Chemistry for Transparent Conducting Oxides Used in Photovoltaic Cells

Autor: Roman Gouk, Steven Verhaverbeke, Robert Jan Visser, Kurtis Leschkies
Rok vydání: 2012
Předmět:
Zdroj: Solid State Phenomena. 187:329-332
ISSN: 1662-9779
DOI: 10.4028/www.scientific.net/ssp.187.329
Popis: In thin film photovoltaic silicon stacks, the sun facing contact needs to be transparent and textured. Typically transparent metal oxides are used for this purpose. When using sputtered ZnO as the transparent conducting contact typically an acid etch is used to texture etch the surface. This texturing enables light trapping in the cell and greatly enhances the photoresponse. Traditionally dilute HCl has been used for this purpose. In this paper we present the work on a novel etchant for this purpose consisting of HNO3 and Acetic Acid. This greatly enhances the texturing and hence the light trapping in the cell.
Databáze: OpenAIRE