Systematic investigation on anode etching residue widely generated in manufacturing of low‐temperature polycrystalline‐Si active matrix organic light‐emitting diode

Autor: Yu Jin, Wei Ao, Bin Liu, Yunlei Lu, Lei Li, Wangfeng Xi, Jijun Jiang, Mingdong Ma, Fei Hu, Dongzhi Fu, Dongping Wang, Enlai Wang, Song Jiang
Rok vydání: 2022
Předmět:
Zdroj: Journal of the Society for Information Display. 30:271-291
ISSN: 1938-3657
1071-0922
DOI: 10.1002/jsid.1098
Databáze: OpenAIRE