Detection of C[sub 2]H[sub 4] Using Wide-Bandgap Semiconductor Sensors

Autor: Brent P. Gila, Young-Woo Heo, Fan Ren, B. S. Kang, C. R. Abernathy, Kelly P. Ip, Suku Kim, David P. Norton, Stephen J. Pearton
Rok vydání: 2004
Předmět:
Zdroj: Journal of The Electrochemical Society. 151:G468
ISSN: 0013-4651
DOI: 10.1149/1.1758817
Popis: The characteristics of SC 2 O 3 /AIGaN/GaN metal-oxide semiconductor (MOS) diodes and Pt/ZnO Schottky diodes as detectors of C 2 H 4 are reported. At 25°C, a change in forward current of ∼40 μA at a bias of 2.5 V was obtained in response to a change in ambient from pure N 2 to 10% C 2 H 4 J90% N 2 . The current changes are almost linearly proportional to the testing temperature and reach around 400 μA at 400°C. The mechanism of the change in forward gate current appears to be formation of a dipole layer at the oxide/AIGaN interface that screens some of the piezo-induced channel charge at the AIGaN/GaN interface. The ZnO diodes show no detectable change in current when exposed to ethylene at 25°C but exhibit large changes (up to 10 mA) at higher temperatures. In these diodes the detection mechanism appears to also involve introduction of hydrogen donors into the near-surface region of the ZnO, increasing the effective doping level under the rectifying contact.
Databáze: OpenAIRE