Domain patterning in LiNbO3 and LiTaO3 by focused electron beam
| Autor: | Xijun Li, Kazuya Terabe, Kenji Kitamura, Hideki Hatano |
|---|---|
| Rok vydání: | 2006 |
| Předmět: |
Materials science
business.industry Lithium niobate Mineralogy Condensed Matter Physics Ferroelectricity Inorganic Chemistry chemistry.chemical_compound chemistry Resist Etching (microfabrication) Lithium tantalate Materials Chemistry Cathode ray Optoelectronics business Beam (structure) Photonic crystal |
| Zdroj: | Journal of Crystal Growth. 292:324-327 |
| ISSN: | 0022-0248 |
| DOI: | 10.1016/j.jcrysgro.2006.04.028 |
| Popis: | Patterned ferroelectric domains and domain selective etching of the patterned domains can provide ferroelectrics-based photonic crystals. In this paper, electron-beam has been applied to switch domains in LiNbO3 (LN) and LiTaO3 (LT) crystals. The complex dynamics of interaction of beam electrons with the crystals has been highlighted. Based on this research, an improved e-beam domain patterning technique utilizing resist covering is successfully applied to switch domains in a z-cut 1 mol% MgO-doped stoichiometric LN at room temperature. |
| Databáze: | OpenAIRE |
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