Fabricating freely suspended structures optimized regarding mechanical and electrochemical stability for sensor applications
| Autor: | K.J. Kolander, M. Köhle, F. J. Giebel, C. M. Zimmer, H. L. Fiedler, K. T. Kallis, P. Czyba |
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| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Microelectromechanical systems Materials science business.industry 02 engineering and technology 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Corrosion Electrochemical gas sensor 0103 physical sciences Galvanic cell Forensic engineering Optoelectronics Electrical and Electronic Engineering Thin film 0210 nano-technology business Layer (electronics) Buffered oxide etch Hydrogen embrittlement |
| Zdroj: | Microelectronic Engineering. 159:202-208 |
| ISSN: | 0167-9317 |
| DOI: | 10.1016/j.mee.2016.04.010 |
| Popis: | The concept of the micro-structured gas sensor discussed in this article promises the measurement of gas concentration and identification of gaseous substances in-situ. Furthermore it is fabricated exclusively using processes that are part of standard CMOS technology. In most MEMS devices a suspended structure is the main part of the sensor chip, realised using a wet etching sacrificial layer process. In this research we investigated the mechanical stability of different materials for the levitating structure and the electrochemical compatibility of the materials in the chip. A detailed analysis of the reactions of different material combinations in buffered oxide etch (BOE) revealed the occurrence of corrosion and hydrogen embrittlement in Al-ITO-LaB6 systems. From there a new mechanism of hydrogen embrittlement in thin film layer systems with ITO was proposed. Finally we showed an optimized way of fabricating the sensor chip with prevention of corrosion and hydrogen embrittlement by galvanic isolation. Display Omitted detailed analysis of the reactions of different material combinations in buffered oxide etch (BOE)new mechanism of hydrogen embrittlement in thin film layer systems with ITOprevention of corrosion and hydrogen embrittlement by galvanic isolationfabrication of a gas sensor that allows the measurement of gas concentration and identification of the gaseous substance in-situ |
| Databáze: | OpenAIRE |
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