Non-reactive dc magnetron sputter deposition of Mo-O thin films from ceramic MoOx targets
| Autor: | Jörg Winkler, Enrico Franzke, Aitana Tarazaga Martín-Luengo, Harald Köstenbauer, Alberta Bonanni, Christian Mitterer, Robert Franz, Julia M. Pachlhofer |
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| Rok vydání: | 2017 |
| Předmět: |
Materials science
Analytical chemistry 02 engineering and technology Substrate (electronics) 010402 general chemistry 01 natural sciences symbols.namesake X-ray photoelectron spectroscopy Materials Chemistry Ceramic Thin film Metallurgy Surfaces and Interfaces General Chemistry Sputter deposition 021001 nanoscience & nanotechnology Condensed Matter Physics 0104 chemical sciences Surfaces Coatings and Films Carbon film visual_art Cavity magnetron symbols visual_art.visual_art_medium 0210 nano-technology Raman spectroscopy |
| Zdroj: | Surface and Coatings Technology. 332:80-85 |
| ISSN: | 0257-8972 |
| Popis: | The present work investigates the microstructure-property relations of Mo-O thin films synthesised by non-reactive dc magnetron sputter deposition from ceramic MoO x targets with compositions ranging from x = 2.5 to 2.8. Two series of films with different deposition powers, 150 and 450 W, were synthesised. The O content in the films is ~ 10% lower than in the target due to element-specific scattering of the sputtered species during the transport from the target to the substrate. The evolution of microstructure and chemical bonds was studied by X-ray photoelectron spectroscopy, X-ray diffraction and Raman spectroscopy. The structure of the films is dominated by the thermodynamically stable phases MoO 2 and MoO 3 , as well as the intermediate phases Mo 4 O 11 and Mo 9 O 26 . The films exhibit high absorbance of up to 75% and reflectance below 12% with electrical resistivity values in the range of 10 − 2 to 1 Ωcm. In general, the use of oxide targets in dc magnetron sputter deposition of Mo-O films offers an efficient and reliable alternative to films sputtered reactively from metal targets and might thus enable their use in a wide range of opto-electronic applications. |
| Databáze: | OpenAIRE |
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