| Autor: |
Fu Dejun, Fan Xiangjun, He Meng-Bing, Wu Da-Wei, Luo Hai-lin, Zhang Zhihong, Guo Huaixi |
| Rok vydání: |
1997 |
| Předmět: |
|
| Zdroj: |
Acta Physica Sinica. 46:530 |
| ISSN: |
1000-3290 |
| Popis: |
Nitride carbon thin films have been deposited by plasma-enhanced chemical vapor phase deposition. The results of transmission-electron diffraction indicated that films have polycrystal structures. Carbon and nitrogen atoms binding energies and the nitrogen content of the-films are measured out by X-ray photoelectron spectroscopy.The Fourier transform infrared spectrum show that there is no graphite phase in the films,and the Vickers hardness of the films vary from 29.2 to 50.0GPa. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
|
